4/18/2011	12:29:15 PM	Run aborted at 12:29 PM
4/18/2011	12:29:15 PM	Helium valve closed
4/18/2011	12:29:15 PM	H2 valve closed
4/18/2011	12:29:15 PM	BCl3 valve closed
4/18/2011	12:29:15 PM	PH3 valve closed
4/18/2011	12:29:15 PM	SiCl4 pre valve closed
4/18/2011	12:29:15 PM	SiCl4 post valve closed
4/18/2011	12:29:15 PM	Bypass valve closed
4/18/2011	12:29:15 PM	Main Vac valve closed
4/18/2011	12:29:15 PM	Bubbler valve closed
4/18/2011	12:29:15 PM	Helium MFC set to  0.000000
4/18/2011	12:29:15 PM	H2 MFC set to  0.000000
4/18/2011	12:29:15 PM	BCl3 MFC set to  0.000000
4/18/2011	12:29:15 PM	PHl3 MFC set to  0.000000
4/18/2011	12:29:15 PM	SiCl4 MFC set to  0.000000
4/18/2011	12:29:15 PM	Tube furnace set to 0
4/18/2011	12:37:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	12:37:30 PM	Recipe started at 12:37 PM
4/18/2011	12:37:30 PM	Helium valve closed
4/18/2011	12:37:30 PM	H2 valve closed
4/18/2011	12:37:30 PM	BCl3 valve closed
4/18/2011	12:37:30 PM	PH3 valve closed
4/18/2011	12:37:30 PM	SiCl4 pre valve closed
4/18/2011	12:37:30 PM	SiCl4 post valve closed
4/18/2011	12:37:30 PM	Main Vac valve closed
4/18/2011	12:37:30 PM	Bubbler valve closed
4/18/2011	12:37:30 PM	Bypass valve opened
4/18/2011	12:37:30 PM	Helium MFC set to  0.000000
4/18/2011	12:37:30 PM	H2 MFC set to  0.000000
4/18/2011	12:37:30 PM	BCl3 MFC set to  0.000000
4/18/2011	12:37:30 PM	PHl3 MFC set to  0.000000
4/18/2011	12:37:30 PM	SiCl4 MFC set to  0.000000
4/18/2011	12:37:30 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	12:37:31 PM	Tube furnace set to 0
4/18/2011	12:38:03 PM	Helium valve closed
4/18/2011	12:38:03 PM	H2 valve closed
4/18/2011	12:38:03 PM	BCl3 valve closed
4/18/2011	12:38:03 PM	PH3 valve closed
4/18/2011	12:38:03 PM	SiCl4 pre valve closed
4/18/2011	12:38:03 PM	SiCl4 post valve closed
4/18/2011	12:38:03 PM	Bubbler valve closed
4/18/2011	12:38:03 PM	Main Vac valve opened
4/18/2011	12:38:03 PM	Bypass valve opened
4/18/2011	12:38:03 PM	Helium MFC set to  0.000000
4/18/2011	12:38:03 PM	H2 MFC set to  0.000000
4/18/2011	12:38:03 PM	BCl3 MFC set to  0.000000
4/18/2011	12:38:03 PM	PHl3 MFC set to  0.000000
4/18/2011	12:38:03 PM	SiCl4 MFC set to  0.000000
4/18/2011	12:38:03 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	12:38:03 PM	Tube furnace set to 0
4/18/2011	12:38:03 PM	Run finished at 12:38 PM
4/18/2011	12:38:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	2:10:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/18/2011	2:11:01 PM	Recipe started at 2:10 PM
4/18/2011	2:11:01 PM	Helium valve closed
4/18/2011	2:11:01 PM	H2 valve closed
4/18/2011	2:11:01 PM	BCl3 valve closed
4/18/2011	2:11:01 PM	PH3 valve closed
4/18/2011	2:11:01 PM	SiCl4 pre valve closed
4/18/2011	2:11:01 PM	SiCl4 post valve closed
4/18/2011	2:11:01 PM	Main Vac valve closed
4/18/2011	2:11:01 PM	Bubbler valve closed
4/18/2011	2:11:01 PM	Bypass valve opened
4/18/2011	2:11:01 PM	Helium MFC set to  0.000000
4/18/2011	2:11:01 PM	H2 MFC set to  0.000000
4/18/2011	2:11:01 PM	BCl3 MFC set to  0.000000
4/18/2011	2:11:01 PM	PHl3 MFC set to  0.000000
4/18/2011	2:11:01 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:11:01 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:11:01 PM	Tube furnace set to 0
4/18/2011	2:11:02 PM	Helium valve closed
4/18/2011	2:11:02 PM	H2 valve closed
4/18/2011	2:11:02 PM	BCl3 valve closed
4/18/2011	2:11:02 PM	PH3 valve closed
4/18/2011	2:11:02 PM	SiCl4 pre valve closed
4/18/2011	2:11:02 PM	SiCl4 post valve closed
4/18/2011	2:11:02 PM	Bubbler valve closed
4/18/2011	2:11:02 PM	Main Vac valve opened
4/18/2011	2:11:02 PM	Bypass valve opened
4/18/2011	2:11:02 PM	Helium MFC set to  0.000000
4/18/2011	2:11:02 PM	H2 MFC set to  0.000000
4/18/2011	2:11:02 PM	BCl3 MFC set to  0.000000
4/18/2011	2:11:02 PM	PHl3 MFC set to  0.000000
4/18/2011	2:11:02 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:11:02 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:11:02 PM	Tube furnace set to 0
4/18/2011	2:12:02 PM	H2 valve closed
4/18/2011	2:12:02 PM	BCl3 valve closed
4/18/2011	2:12:02 PM	PH3 valve closed
4/18/2011	2:12:02 PM	SiCl4 pre valve closed
4/18/2011	2:12:02 PM	SiCl4 post valve closed
4/18/2011	2:12:02 PM	Bubbler valve closed
4/18/2011	2:12:02 PM	Helium valve opened
4/18/2011	2:12:02 PM	Main Vac valve opened
4/18/2011	2:12:02 PM	Bypass valve opened
4/18/2011	2:12:02 PM	Helium MFC set to  100.000000
4/18/2011	2:12:02 PM	H2 MFC set to  0.000000
4/18/2011	2:12:02 PM	BCl3 MFC set to  0.000000
4/18/2011	2:12:02 PM	PHl3 MFC set to  0.000000
4/18/2011	2:12:02 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:12:02 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:12:02 PM	Tube furnace set to 0
4/18/2011	2:13:02 PM	Helium valve closed
4/18/2011	2:13:02 PM	H2 valve closed
4/18/2011	2:13:02 PM	BCl3 valve closed
4/18/2011	2:13:02 PM	PH3 valve closed
4/18/2011	2:13:02 PM	SiCl4 pre valve closed
4/18/2011	2:13:02 PM	SiCl4 post valve closed
4/18/2011	2:13:02 PM	Bubbler valve closed
4/18/2011	2:13:02 PM	Main Vac valve opened
4/18/2011	2:13:02 PM	Bypass valve opened
4/18/2011	2:13:02 PM	Helium MFC set to  0.000000
4/18/2011	2:13:02 PM	H2 MFC set to  0.000000
4/18/2011	2:13:02 PM	BCl3 MFC set to  0.000000
4/18/2011	2:13:02 PM	PHl3 MFC set to  0.000000
4/18/2011	2:13:02 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:13:02 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:13:02 PM	Tube furnace set to 0
4/18/2011	2:14:02 PM	H2 valve closed
4/18/2011	2:14:02 PM	BCl3 valve closed
4/18/2011	2:14:02 PM	PH3 valve closed
4/18/2011	2:14:02 PM	SiCl4 pre valve closed
4/18/2011	2:14:02 PM	SiCl4 post valve closed
4/18/2011	2:14:02 PM	Bubbler valve closed
4/18/2011	2:14:02 PM	Helium valve opened
4/18/2011	2:14:02 PM	Main Vac valve opened
4/18/2011	2:14:02 PM	Bypass valve opened
4/18/2011	2:14:02 PM	Helium MFC set to  100.000000
4/18/2011	2:14:02 PM	H2 MFC set to  0.000000
4/18/2011	2:14:02 PM	BCl3 MFC set to  0.000000
4/18/2011	2:14:02 PM	PHl3 MFC set to  0.000000
4/18/2011	2:14:02 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:14:02 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:14:03 PM	Tube furnace set to 0
4/18/2011	2:15:03 PM	Helium valve closed
4/18/2011	2:15:03 PM	H2 valve closed
4/18/2011	2:15:03 PM	BCl3 valve closed
4/18/2011	2:15:03 PM	PH3 valve closed
4/18/2011	2:15:03 PM	SiCl4 pre valve closed
4/18/2011	2:15:03 PM	SiCl4 post valve closed
4/18/2011	2:15:03 PM	Bubbler valve closed
4/18/2011	2:15:03 PM	Main Vac valve opened
4/18/2011	2:15:03 PM	Bypass valve opened
4/18/2011	2:15:03 PM	Helium MFC set to  0.000000
4/18/2011	2:15:03 PM	H2 MFC set to  0.000000
4/18/2011	2:15:03 PM	BCl3 MFC set to  0.000000
4/18/2011	2:15:03 PM	PHl3 MFC set to  0.000000
4/18/2011	2:15:03 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:15:03 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:15:03 PM	Tube furnace set to 0
4/18/2011	2:15:57 PM	Run aborted at 2:15 PM
4/18/2011	2:15:57 PM	Helium valve closed
4/18/2011	2:15:57 PM	H2 valve closed
4/18/2011	2:15:57 PM	BCl3 valve closed
4/18/2011	2:15:57 PM	PH3 valve closed
4/18/2011	2:15:57 PM	SiCl4 pre valve closed
4/18/2011	2:15:57 PM	SiCl4 post valve closed
4/18/2011	2:15:57 PM	Bypass valve closed
4/18/2011	2:15:57 PM	Main Vac valve closed
4/18/2011	2:15:57 PM	Bubbler valve closed
4/18/2011	2:15:57 PM	Helium MFC set to  0.000000
4/18/2011	2:15:57 PM	H2 MFC set to  0.000000
4/18/2011	2:15:57 PM	BCl3 MFC set to  0.000000
4/18/2011	2:15:57 PM	PHl3 MFC set to  0.000000
4/18/2011	2:15:57 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:15:57 PM	Tube furnace set to 0
4/18/2011	2:15:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/18/2011	2:16:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	2:16:00 PM	Recipe started at 2:16 PM
4/18/2011	2:16:01 PM	Helium valve closed
4/18/2011	2:16:01 PM	H2 valve closed
4/18/2011	2:16:01 PM	BCl3 valve closed
4/18/2011	2:16:01 PM	PH3 valve closed
4/18/2011	2:16:01 PM	SiCl4 pre valve closed
4/18/2011	2:16:01 PM	SiCl4 post valve closed
4/18/2011	2:16:01 PM	Main Vac valve closed
4/18/2011	2:16:01 PM	Bubbler valve closed
4/18/2011	2:16:01 PM	Bypass valve opened
4/18/2011	2:16:01 PM	Helium MFC set to  0.000000
4/18/2011	2:16:01 PM	H2 MFC set to  0.000000
4/18/2011	2:16:01 PM	BCl3 MFC set to  0.000000
4/18/2011	2:16:01 PM	PHl3 MFC set to  0.000000
4/18/2011	2:16:01 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:16:01 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:16:01 PM	Tube furnace set to 0
4/18/2011	2:16:01 PM	Helium valve closed
4/18/2011	2:16:01 PM	H2 valve closed
4/18/2011	2:16:01 PM	BCl3 valve closed
4/18/2011	2:16:01 PM	PH3 valve closed
4/18/2011	2:16:01 PM	SiCl4 pre valve closed
4/18/2011	2:16:01 PM	SiCl4 post valve closed
4/18/2011	2:16:01 PM	Bubbler valve closed
4/18/2011	2:16:01 PM	Main Vac valve opened
4/18/2011	2:16:01 PM	Bypass valve opened
4/18/2011	2:16:01 PM	Helium MFC set to  0.000000
4/18/2011	2:16:01 PM	H2 MFC set to  0.000000
4/18/2011	2:16:01 PM	BCl3 MFC set to  0.000000
4/18/2011	2:16:01 PM	PHl3 MFC set to  0.000000
4/18/2011	2:16:01 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:16:01 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:16:01 PM	Tube furnace set to 0
4/18/2011	2:16:01 PM	Run finished at 2:16 PM
4/18/2011	2:16:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	2:16:45 PM	Recipe started at 2:16 PM
4/18/2011	2:16:45 PM	BCl3 valve closed
4/18/2011	2:16:45 PM	PH3 valve closed
4/18/2011	2:16:45 PM	SiCl4 pre valve closed
4/18/2011	2:16:45 PM	SiCl4 post valve closed
4/18/2011	2:16:45 PM	Main Vac valve closed
4/18/2011	2:16:45 PM	Bypass valve closed
4/18/2011	2:16:45 PM	Bubbler valve closed
4/18/2011	2:16:45 PM	Helium valve opened
4/18/2011	2:16:45 PM	H2 valve opened
4/18/2011	2:16:45 PM	Helium MFC set to  190.000000
4/18/2011	2:16:45 PM	H2 MFC set to  10.000000
4/18/2011	2:16:45 PM	BCl3 MFC set to  0.000000
4/18/2011	2:16:45 PM	PHl3 MFC set to  0.000000
4/18/2011	2:16:45 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:16:45 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:16:45 PM	Tube furnace set to 0
4/18/2011	2:20:10 PM	BCl3 valve closed
4/18/2011	2:20:10 PM	PH3 valve closed
4/18/2011	2:20:10 PM	SiCl4 pre valve closed
4/18/2011	2:20:10 PM	SiCl4 post valve closed
4/18/2011	2:20:10 PM	Main Vac valve closed
4/18/2011	2:20:10 PM	Bypass valve closed
4/18/2011	2:20:10 PM	Helium valve opened
4/18/2011	2:20:10 PM	H2 valve opened
4/18/2011	2:20:10 PM	Bubbler valve opened
4/18/2011	2:20:10 PM	Helium MFC set to  47.500000
4/18/2011	2:20:10 PM	H2 MFC set to  2.500000
4/18/2011	2:20:10 PM	BCl3 MFC set to  0.000000
4/18/2011	2:20:10 PM	PHl3 MFC set to  0.000000
4/18/2011	2:20:10 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:20:10 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:20:10 PM	Tube furnace set to 400
4/18/2011	2:50:10 PM	Helium valve closed
4/18/2011	2:50:10 PM	H2 valve closed
4/18/2011	2:50:10 PM	BCl3 valve closed
4/18/2011	2:50:10 PM	PH3 valve closed
4/18/2011	2:50:10 PM	SiCl4 pre valve closed
4/18/2011	2:50:10 PM	SiCl4 post valve closed
4/18/2011	2:50:10 PM	Main Vac valve closed
4/18/2011	2:50:10 PM	Bypass valve closed
4/18/2011	2:50:10 PM	Bubbler valve closed
4/18/2011	2:50:10 PM	Helium MFC set to  0.000000
4/18/2011	2:50:10 PM	H2 MFC set to  0.000000
4/18/2011	2:50:10 PM	BCl3 MFC set to  0.000000
4/18/2011	2:50:10 PM	PHl3 MFC set to  0.000000
4/18/2011	2:50:10 PM	SiCl4 MFC set to  0.000000
4/18/2011	2:50:10 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	2:50:11 PM	Tube furnace set to 0
4/18/2011	2:50:11 PM	Run finished at 2:50 PM
4/18/2011	3:38:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	3:38:37 PM	Recipe started at 3:38 PM
4/18/2011	3:38:37 PM	Helium valve closed
4/18/2011	3:38:37 PM	H2 valve closed
4/18/2011	3:38:37 PM	BCl3 valve closed
4/18/2011	3:38:37 PM	PH3 valve closed
4/18/2011	3:38:37 PM	SiCl4 pre valve closed
4/18/2011	3:38:37 PM	SiCl4 post valve closed
4/18/2011	3:38:37 PM	Main Vac valve closed
4/18/2011	3:38:37 PM	Bubbler valve closed
4/18/2011	3:38:37 PM	Bypass valve opened
4/18/2011	3:38:37 PM	Helium MFC set to  0.000000
4/18/2011	3:38:37 PM	H2 MFC set to  0.000000
4/18/2011	3:38:37 PM	BCl3 MFC set to  0.000000
4/18/2011	3:38:37 PM	PHl3 MFC set to  0.000000
4/18/2011	3:38:37 PM	SiCl4 MFC set to  0.000000
4/18/2011	3:38:37 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	3:38:37 PM	Tube furnace set to 0
4/18/2011	3:38:58 PM	Helium valve closed
4/18/2011	3:38:58 PM	H2 valve closed
4/18/2011	3:38:58 PM	BCl3 valve closed
4/18/2011	3:38:58 PM	PH3 valve closed
4/18/2011	3:38:58 PM	SiCl4 pre valve closed
4/18/2011	3:38:58 PM	SiCl4 post valve closed
4/18/2011	3:38:58 PM	Bubbler valve closed
4/18/2011	3:38:58 PM	Main Vac valve opened
4/18/2011	3:38:58 PM	Bypass valve opened
4/18/2011	3:38:58 PM	Helium MFC set to  0.000000
4/18/2011	3:38:58 PM	H2 MFC set to  0.000000
4/18/2011	3:38:58 PM	BCl3 MFC set to  0.000000
4/18/2011	3:38:58 PM	PHl3 MFC set to  0.000000
4/18/2011	3:38:58 PM	SiCl4 MFC set to  0.000000
4/18/2011	3:38:58 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	3:38:58 PM	Tube furnace set to 0
4/18/2011	3:38:59 PM	Run finished at 3:38 PM
4/18/2011	3:38:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	8:53:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/18/2011	8:53:19 PM	Recipe started at 8:53 PM
4/18/2011	8:53:19 PM	H2 valve closed
4/18/2011	8:53:19 PM	BCl3 valve closed
4/18/2011	8:53:19 PM	PH3 valve closed
4/18/2011	8:53:19 PM	SiCl4 pre valve closed
4/18/2011	8:53:19 PM	SiCl4 post valve closed
4/18/2011	8:53:19 PM	Main Vac valve closed
4/18/2011	8:53:19 PM	Bypass valve closed
4/18/2011	8:53:19 PM	Bubbler valve closed
4/18/2011	8:53:19 PM	Helium valve opened
4/18/2011	8:53:19 PM	Helium MFC set to  500.000000
4/18/2011	8:53:19 PM	H2 MFC set to  0.000000
4/18/2011	8:53:19 PM	BCl3 MFC set to  0.000000
4/18/2011	8:53:19 PM	PHl3 MFC set to  0.000000
4/18/2011	8:53:19 PM	SiCl4 MFC set to  0.000000
4/18/2011	8:53:19 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	8:53:19 PM	Tube furnace set to 0
4/18/2011	8:54:39 PM	Helium valve closed
4/18/2011	8:54:39 PM	H2 valve closed
4/18/2011	8:54:39 PM	BCl3 valve closed
4/18/2011	8:54:39 PM	PH3 valve closed
4/18/2011	8:54:39 PM	SiCl4 pre valve closed
4/18/2011	8:54:39 PM	SiCl4 post valve closed
4/18/2011	8:54:39 PM	Main Vac valve closed
4/18/2011	8:54:39 PM	Bypass valve closed
4/18/2011	8:54:39 PM	Bubbler valve closed
4/18/2011	8:54:39 PM	Helium MFC set to  0.000000
4/18/2011	8:54:39 PM	H2 MFC set to  0.000000
4/18/2011	8:54:39 PM	BCl3 MFC set to  0.000000
4/18/2011	8:54:39 PM	PHl3 MFC set to  0.000000
4/18/2011	8:54:39 PM	SiCl4 MFC set to  0.000000
4/18/2011	8:54:39 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	8:54:39 PM	Tube furnace set to 0
4/18/2011	8:54:40 PM	Run finished at 8:54 PM
4/18/2011	8:54:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/18/2011	8:56:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	8:56:53 PM	Recipe started at 8:56 PM
4/18/2011	8:56:53 PM	Helium valve closed
4/18/2011	8:56:53 PM	H2 valve closed
4/18/2011	8:56:53 PM	BCl3 valve closed
4/18/2011	8:56:53 PM	PH3 valve closed
4/18/2011	8:56:53 PM	SiCl4 pre valve closed
4/18/2011	8:56:53 PM	SiCl4 post valve closed
4/18/2011	8:56:53 PM	Main Vac valve closed
4/18/2011	8:56:53 PM	Bubbler valve closed
4/18/2011	8:56:53 PM	Bypass valve opened
4/18/2011	8:56:53 PM	Helium MFC set to  0.000000
4/18/2011	8:56:53 PM	H2 MFC set to  0.000000
4/18/2011	8:56:53 PM	BCl3 MFC set to  0.000000
4/18/2011	8:56:53 PM	PHl3 MFC set to  0.000000
4/18/2011	8:56:53 PM	SiCl4 MFC set to  0.000000
4/18/2011	8:56:53 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	8:56:53 PM	Tube furnace set to 0
4/18/2011	8:57:24 PM	Helium valve closed
4/18/2011	8:57:24 PM	H2 valve closed
4/18/2011	8:57:24 PM	BCl3 valve closed
4/18/2011	8:57:24 PM	PH3 valve closed
4/18/2011	8:57:24 PM	SiCl4 pre valve closed
4/18/2011	8:57:24 PM	SiCl4 post valve closed
4/18/2011	8:57:24 PM	Bubbler valve closed
4/18/2011	8:57:24 PM	Main Vac valve opened
4/18/2011	8:57:24 PM	Bypass valve opened
4/18/2011	8:57:24 PM	Helium MFC set to  0.000000
4/18/2011	8:57:24 PM	H2 MFC set to  0.000000
4/18/2011	8:57:24 PM	BCl3 MFC set to  0.000000
4/18/2011	8:57:24 PM	PHl3 MFC set to  0.000000
4/18/2011	8:57:24 PM	SiCl4 MFC set to  0.000000
4/18/2011	8:57:24 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	8:57:24 PM	Tube furnace set to 0
4/18/2011	8:57:25 PM	Run finished at 8:57 PM
4/18/2011	8:57:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	10:49:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/18/2011	10:49:03 PM	Recipe started at 10:49 PM
4/18/2011	10:49:03 PM	H2 valve closed
4/18/2011	10:49:03 PM	BCl3 valve closed
4/18/2011	10:49:03 PM	PH3 valve closed
4/18/2011	10:49:03 PM	SiCl4 pre valve closed
4/18/2011	10:49:03 PM	SiCl4 post valve closed
4/18/2011	10:49:03 PM	Main Vac valve closed
4/18/2011	10:49:03 PM	Bypass valve closed
4/18/2011	10:49:03 PM	Bubbler valve closed
4/18/2011	10:49:03 PM	Helium valve opened
4/18/2011	10:49:03 PM	Helium MFC set to  500.000000
4/18/2011	10:49:03 PM	H2 MFC set to  0.000000
4/18/2011	10:49:03 PM	BCl3 MFC set to  0.000000
4/18/2011	10:49:03 PM	PHl3 MFC set to  0.000000
4/18/2011	10:49:03 PM	SiCl4 MFC set to  0.000000
4/18/2011	10:49:03 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	10:49:03 PM	Tube furnace set to 0
4/18/2011	10:50:23 PM	Helium valve closed
4/18/2011	10:50:23 PM	H2 valve closed
4/18/2011	10:50:23 PM	BCl3 valve closed
4/18/2011	10:50:23 PM	PH3 valve closed
4/18/2011	10:50:23 PM	SiCl4 pre valve closed
4/18/2011	10:50:23 PM	SiCl4 post valve closed
4/18/2011	10:50:23 PM	Main Vac valve closed
4/18/2011	10:50:23 PM	Bypass valve closed
4/18/2011	10:50:23 PM	Bubbler valve closed
4/18/2011	10:50:23 PM	Helium MFC set to  0.000000
4/18/2011	10:50:23 PM	H2 MFC set to  0.000000
4/18/2011	10:50:23 PM	BCl3 MFC set to  0.000000
4/18/2011	10:50:23 PM	PHl3 MFC set to  0.000000
4/18/2011	10:50:23 PM	SiCl4 MFC set to  0.000000
4/18/2011	10:50:23 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	10:50:23 PM	Tube furnace set to 0
4/18/2011	10:50:24 PM	Run finished at 10:50 PM
4/18/2011	10:50:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/18/2011	10:54:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	10:54:05 PM	Recipe started at 10:54 PM
4/18/2011	10:54:05 PM	Helium valve closed
4/18/2011	10:54:05 PM	H2 valve closed
4/18/2011	10:54:05 PM	BCl3 valve closed
4/18/2011	10:54:05 PM	PH3 valve closed
4/18/2011	10:54:05 PM	SiCl4 pre valve closed
4/18/2011	10:54:05 PM	SiCl4 post valve closed
4/18/2011	10:54:05 PM	Main Vac valve closed
4/18/2011	10:54:05 PM	Bubbler valve closed
4/18/2011	10:54:05 PM	Bypass valve opened
4/18/2011	10:54:05 PM	Helium MFC set to  0.000000
4/18/2011	10:54:05 PM	H2 MFC set to  0.000000
4/18/2011	10:54:05 PM	BCl3 MFC set to  0.000000
4/18/2011	10:54:05 PM	PHl3 MFC set to  0.000000
4/18/2011	10:54:05 PM	SiCl4 MFC set to  0.000000
4/18/2011	10:54:05 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	10:54:06 PM	Tube furnace set to 0
4/18/2011	10:54:37 PM	Helium valve closed
4/18/2011	10:54:37 PM	H2 valve closed
4/18/2011	10:54:37 PM	BCl3 valve closed
4/18/2011	10:54:37 PM	PH3 valve closed
4/18/2011	10:54:37 PM	SiCl4 pre valve closed
4/18/2011	10:54:37 PM	SiCl4 post valve closed
4/18/2011	10:54:37 PM	Bubbler valve closed
4/18/2011	10:54:37 PM	Main Vac valve opened
4/18/2011	10:54:37 PM	Bypass valve opened
4/18/2011	10:54:37 PM	Helium MFC set to  0.000000
4/18/2011	10:54:37 PM	H2 MFC set to  0.000000
4/18/2011	10:54:37 PM	BCl3 MFC set to  0.000000
4/18/2011	10:54:37 PM	PHl3 MFC set to  0.000000
4/18/2011	10:54:37 PM	SiCl4 MFC set to  0.000000
4/18/2011	10:54:37 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	10:54:37 PM	Tube furnace set to 0
4/18/2011	10:54:37 PM	Run finished at 10:54 PM
4/18/2011	10:54:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/18/2011	11:44:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/18/2011	11:45:06 PM	Recipe started at 11:45 PM
4/18/2011	11:45:06 PM	Helium valve closed
4/18/2011	11:45:06 PM	H2 valve closed
4/18/2011	11:45:06 PM	BCl3 valve closed
4/18/2011	11:45:06 PM	PH3 valve closed
4/18/2011	11:45:06 PM	SiCl4 pre valve closed
4/18/2011	11:45:06 PM	SiCl4 post valve closed
4/18/2011	11:45:06 PM	Main Vac valve closed
4/18/2011	11:45:06 PM	Bubbler valve closed
4/18/2011	11:45:06 PM	Bypass valve opened
4/18/2011	11:45:06 PM	Helium MFC set to  0.000000
4/18/2011	11:45:06 PM	H2 MFC set to  0.000000
4/18/2011	11:45:06 PM	BCl3 MFC set to  0.000000
4/18/2011	11:45:06 PM	PHl3 MFC set to  0.000000
4/18/2011	11:45:06 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:45:06 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:45:06 PM	Tube furnace set to 0
4/18/2011	11:45:07 PM	Helium valve closed
4/18/2011	11:45:07 PM	H2 valve closed
4/18/2011	11:45:07 PM	BCl3 valve closed
4/18/2011	11:45:07 PM	PH3 valve closed
4/18/2011	11:45:07 PM	SiCl4 pre valve closed
4/18/2011	11:45:07 PM	SiCl4 post valve closed
4/18/2011	11:45:07 PM	Bubbler valve closed
4/18/2011	11:45:07 PM	Main Vac valve opened
4/18/2011	11:45:07 PM	Bypass valve opened
4/18/2011	11:45:07 PM	Helium MFC set to  0.000000
4/18/2011	11:45:07 PM	H2 MFC set to  0.000000
4/18/2011	11:45:07 PM	BCl3 MFC set to  0.000000
4/18/2011	11:45:07 PM	PHl3 MFC set to  0.000000
4/18/2011	11:45:07 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:45:07 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:45:07 PM	Tube furnace set to 0
4/18/2011	11:46:07 PM	H2 valve closed
4/18/2011	11:46:07 PM	BCl3 valve closed
4/18/2011	11:46:07 PM	PH3 valve closed
4/18/2011	11:46:07 PM	SiCl4 pre valve closed
4/18/2011	11:46:07 PM	SiCl4 post valve closed
4/18/2011	11:46:07 PM	Bubbler valve closed
4/18/2011	11:46:07 PM	Helium valve opened
4/18/2011	11:46:07 PM	Main Vac valve opened
4/18/2011	11:46:07 PM	Bypass valve opened
4/18/2011	11:46:07 PM	Helium MFC set to  100.000000
4/18/2011	11:46:07 PM	H2 MFC set to  0.000000
4/18/2011	11:46:07 PM	BCl3 MFC set to  0.000000
4/18/2011	11:46:07 PM	PHl3 MFC set to  0.000000
4/18/2011	11:46:07 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:46:07 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:46:07 PM	Tube furnace set to 0
4/18/2011	11:47:07 PM	Helium valve closed
4/18/2011	11:47:07 PM	H2 valve closed
4/18/2011	11:47:07 PM	BCl3 valve closed
4/18/2011	11:47:07 PM	PH3 valve closed
4/18/2011	11:47:07 PM	SiCl4 pre valve closed
4/18/2011	11:47:07 PM	SiCl4 post valve closed
4/18/2011	11:47:07 PM	Bubbler valve closed
4/18/2011	11:47:07 PM	Main Vac valve opened
4/18/2011	11:47:07 PM	Bypass valve opened
4/18/2011	11:47:07 PM	Helium MFC set to  0.000000
4/18/2011	11:47:07 PM	H2 MFC set to  0.000000
4/18/2011	11:47:07 PM	BCl3 MFC set to  0.000000
4/18/2011	11:47:07 PM	PHl3 MFC set to  0.000000
4/18/2011	11:47:07 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:47:07 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:47:07 PM	Tube furnace set to 0
4/18/2011	11:48:07 PM	H2 valve closed
4/18/2011	11:48:07 PM	BCl3 valve closed
4/18/2011	11:48:07 PM	PH3 valve closed
4/18/2011	11:48:07 PM	SiCl4 pre valve closed
4/18/2011	11:48:07 PM	SiCl4 post valve closed
4/18/2011	11:48:07 PM	Bubbler valve closed
4/18/2011	11:48:07 PM	Helium valve opened
4/18/2011	11:48:07 PM	Main Vac valve opened
4/18/2011	11:48:07 PM	Bypass valve opened
4/18/2011	11:48:07 PM	Helium MFC set to  100.000000
4/18/2011	11:48:07 PM	H2 MFC set to  0.000000
4/18/2011	11:48:07 PM	BCl3 MFC set to  0.000000
4/18/2011	11:48:07 PM	PHl3 MFC set to  0.000000
4/18/2011	11:48:07 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:48:07 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:48:07 PM	Tube furnace set to 0
4/18/2011	11:49:07 PM	Helium valve closed
4/18/2011	11:49:07 PM	H2 valve closed
4/18/2011	11:49:07 PM	BCl3 valve closed
4/18/2011	11:49:07 PM	PH3 valve closed
4/18/2011	11:49:07 PM	SiCl4 pre valve closed
4/18/2011	11:49:07 PM	SiCl4 post valve closed
4/18/2011	11:49:07 PM	Bubbler valve closed
4/18/2011	11:49:07 PM	Main Vac valve opened
4/18/2011	11:49:07 PM	Bypass valve opened
4/18/2011	11:49:07 PM	Helium MFC set to  0.000000
4/18/2011	11:49:07 PM	H2 MFC set to  0.000000
4/18/2011	11:49:07 PM	BCl3 MFC set to  0.000000
4/18/2011	11:49:07 PM	PHl3 MFC set to  0.000000
4/18/2011	11:49:07 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:49:07 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:49:08 PM	Tube furnace set to 0
4/18/2011	11:50:08 PM	H2 valve closed
4/18/2011	11:50:08 PM	BCl3 valve closed
4/18/2011	11:50:08 PM	PH3 valve closed
4/18/2011	11:50:08 PM	SiCl4 pre valve closed
4/18/2011	11:50:08 PM	SiCl4 post valve closed
4/18/2011	11:50:08 PM	Bubbler valve closed
4/18/2011	11:50:08 PM	Helium valve opened
4/18/2011	11:50:08 PM	Main Vac valve opened
4/18/2011	11:50:08 PM	Bypass valve opened
4/18/2011	11:50:08 PM	Helium MFC set to  100.000000
4/18/2011	11:50:08 PM	H2 MFC set to  0.000000
4/18/2011	11:50:08 PM	BCl3 MFC set to  0.000000
4/18/2011	11:50:08 PM	PHl3 MFC set to  0.000000
4/18/2011	11:50:08 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:50:08 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:50:08 PM	Tube furnace set to 0
4/18/2011	11:51:08 PM	Helium valve closed
4/18/2011	11:51:08 PM	H2 valve closed
4/18/2011	11:51:08 PM	BCl3 valve closed
4/18/2011	11:51:08 PM	PH3 valve closed
4/18/2011	11:51:08 PM	SiCl4 pre valve closed
4/18/2011	11:51:08 PM	SiCl4 post valve closed
4/18/2011	11:51:08 PM	Bubbler valve closed
4/18/2011	11:51:08 PM	Main Vac valve opened
4/18/2011	11:51:08 PM	Bypass valve opened
4/18/2011	11:51:08 PM	Helium MFC set to  0.000000
4/18/2011	11:51:08 PM	H2 MFC set to  0.000000
4/18/2011	11:51:08 PM	BCl3 MFC set to  0.000000
4/18/2011	11:51:08 PM	PHl3 MFC set to  0.000000
4/18/2011	11:51:08 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:51:08 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:51:08 PM	Tube furnace set to 0
4/18/2011	11:52:08 PM	H2 valve closed
4/18/2011	11:52:08 PM	BCl3 valve closed
4/18/2011	11:52:08 PM	PH3 valve closed
4/18/2011	11:52:08 PM	SiCl4 pre valve closed
4/18/2011	11:52:08 PM	SiCl4 post valve closed
4/18/2011	11:52:08 PM	Bubbler valve closed
4/18/2011	11:52:08 PM	Helium valve opened
4/18/2011	11:52:08 PM	Main Vac valve opened
4/18/2011	11:52:08 PM	Bypass valve opened
4/18/2011	11:52:08 PM	Helium MFC set to  100.000000
4/18/2011	11:52:08 PM	H2 MFC set to  0.000000
4/18/2011	11:52:08 PM	BCl3 MFC set to  0.000000
4/18/2011	11:52:08 PM	PHl3 MFC set to  0.000000
4/18/2011	11:52:08 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:52:08 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:52:08 PM	Tube furnace set to 0
4/18/2011	11:53:08 PM	Helium valve closed
4/18/2011	11:53:08 PM	H2 valve closed
4/18/2011	11:53:08 PM	BCl3 valve closed
4/18/2011	11:53:08 PM	PH3 valve closed
4/18/2011	11:53:08 PM	SiCl4 pre valve closed
4/18/2011	11:53:08 PM	SiCl4 post valve closed
4/18/2011	11:53:08 PM	Bubbler valve closed
4/18/2011	11:53:08 PM	Main Vac valve opened
4/18/2011	11:53:08 PM	Bypass valve opened
4/18/2011	11:53:08 PM	Helium MFC set to  0.000000
4/18/2011	11:53:08 PM	H2 MFC set to  0.000000
4/18/2011	11:53:08 PM	BCl3 MFC set to  0.000000
4/18/2011	11:53:08 PM	PHl3 MFC set to  0.000000
4/18/2011	11:53:08 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:53:08 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:53:08 PM	Tube furnace set to 0
4/18/2011	11:54:08 PM	H2 valve closed
4/18/2011	11:54:08 PM	BCl3 valve closed
4/18/2011	11:54:08 PM	PH3 valve closed
4/18/2011	11:54:08 PM	SiCl4 pre valve closed
4/18/2011	11:54:08 PM	SiCl4 post valve closed
4/18/2011	11:54:08 PM	Bubbler valve closed
4/18/2011	11:54:08 PM	Helium valve opened
4/18/2011	11:54:08 PM	Main Vac valve opened
4/18/2011	11:54:08 PM	Bypass valve opened
4/18/2011	11:54:08 PM	Helium MFC set to  100.000000
4/18/2011	11:54:08 PM	H2 MFC set to  0.000000
4/18/2011	11:54:08 PM	BCl3 MFC set to  0.000000
4/18/2011	11:54:08 PM	PHl3 MFC set to  0.000000
4/18/2011	11:54:08 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:54:08 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:54:09 PM	Tube furnace set to 0
4/18/2011	11:55:09 PM	Helium valve closed
4/18/2011	11:55:09 PM	H2 valve closed
4/18/2011	11:55:09 PM	BCl3 valve closed
4/18/2011	11:55:09 PM	PH3 valve closed
4/18/2011	11:55:09 PM	SiCl4 pre valve closed
4/18/2011	11:55:09 PM	SiCl4 post valve closed
4/18/2011	11:55:09 PM	Bubbler valve closed
4/18/2011	11:55:09 PM	Main Vac valve opened
4/18/2011	11:55:09 PM	Bypass valve opened
4/18/2011	11:55:09 PM	Helium MFC set to  0.000000
4/18/2011	11:55:09 PM	H2 MFC set to  0.000000
4/18/2011	11:55:09 PM	BCl3 MFC set to  0.000000
4/18/2011	11:55:09 PM	PHl3 MFC set to  0.000000
4/18/2011	11:55:09 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:55:09 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:55:09 PM	Tube furnace set to 0
4/18/2011	11:56:09 PM	H2 valve closed
4/18/2011	11:56:09 PM	BCl3 valve closed
4/18/2011	11:56:09 PM	PH3 valve closed
4/18/2011	11:56:09 PM	SiCl4 pre valve closed
4/18/2011	11:56:09 PM	SiCl4 post valve closed
4/18/2011	11:56:09 PM	Bubbler valve closed
4/18/2011	11:56:09 PM	Helium valve opened
4/18/2011	11:56:09 PM	Main Vac valve opened
4/18/2011	11:56:09 PM	Bypass valve opened
4/18/2011	11:56:09 PM	Helium MFC set to  100.000000
4/18/2011	11:56:09 PM	H2 MFC set to  0.000000
4/18/2011	11:56:09 PM	BCl3 MFC set to  0.000000
4/18/2011	11:56:09 PM	PHl3 MFC set to  0.000000
4/18/2011	11:56:09 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:56:09 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:56:09 PM	Tube furnace set to 0
4/18/2011	11:57:09 PM	Helium valve closed
4/18/2011	11:57:09 PM	H2 valve closed
4/18/2011	11:57:09 PM	BCl3 valve closed
4/18/2011	11:57:09 PM	PH3 valve closed
4/18/2011	11:57:09 PM	SiCl4 pre valve closed
4/18/2011	11:57:09 PM	SiCl4 post valve closed
4/18/2011	11:57:09 PM	Bubbler valve closed
4/18/2011	11:57:09 PM	Main Vac valve opened
4/18/2011	11:57:09 PM	Bypass valve opened
4/18/2011	11:57:09 PM	Helium MFC set to  0.000000
4/18/2011	11:57:09 PM	H2 MFC set to  0.000000
4/18/2011	11:57:09 PM	BCl3 MFC set to  0.000000
4/18/2011	11:57:09 PM	PHl3 MFC set to  0.000000
4/18/2011	11:57:09 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:57:09 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:57:09 PM	Tube furnace set to 0
4/18/2011	11:58:09 PM	H2 valve closed
4/18/2011	11:58:09 PM	BCl3 valve closed
4/18/2011	11:58:09 PM	PH3 valve closed
4/18/2011	11:58:09 PM	SiCl4 pre valve closed
4/18/2011	11:58:09 PM	SiCl4 post valve closed
4/18/2011	11:58:09 PM	Bubbler valve closed
4/18/2011	11:58:09 PM	Helium valve opened
4/18/2011	11:58:09 PM	Main Vac valve opened
4/18/2011	11:58:09 PM	Bypass valve opened
4/18/2011	11:58:09 PM	Helium MFC set to  100.000000
4/18/2011	11:58:09 PM	H2 MFC set to  0.000000
4/18/2011	11:58:09 PM	BCl3 MFC set to  0.000000
4/18/2011	11:58:09 PM	PHl3 MFC set to  0.000000
4/18/2011	11:58:09 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:58:09 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:58:09 PM	Tube furnace set to 0
4/18/2011	11:59:09 PM	Helium valve closed
4/18/2011	11:59:09 PM	H2 valve closed
4/18/2011	11:59:09 PM	BCl3 valve closed
4/18/2011	11:59:09 PM	PH3 valve closed
4/18/2011	11:59:09 PM	SiCl4 pre valve closed
4/18/2011	11:59:09 PM	SiCl4 post valve closed
4/18/2011	11:59:09 PM	Bubbler valve closed
4/18/2011	11:59:09 PM	Main Vac valve opened
4/18/2011	11:59:09 PM	Bypass valve opened
4/18/2011	11:59:09 PM	Helium MFC set to  0.000000
4/18/2011	11:59:09 PM	H2 MFC set to  0.000000
4/18/2011	11:59:09 PM	BCl3 MFC set to  0.000000
4/18/2011	11:59:09 PM	PHl3 MFC set to  0.000000
4/18/2011	11:59:09 PM	SiCl4 MFC set to  0.000000
4/18/2011	11:59:09 PM	Bypass solenoid MFC set to  0.000000
4/18/2011	11:59:10 PM	Tube furnace set to 0
